Pressure transmitter for pressure detector in the combustion chamber of internal combustion engine

1991 
In a pressure sensor (11), the force is introduced via a membrane (14) and a plunger (18) onto a piezoresistive measuring element (21). The measuring element (21) is part of a monocrystalline silicon chip (20). The piezoresistive measuring element (21) is connected to the monocrystalline silicon chip in a half-bridge circuit or a Wheatstone bridge circuit. Also on the silicon chip (20) are a stabilizing circuit (23), an amplifier circuit (24) for the measurement signal picked up and electrical elements for temperature compensation of the zero point and sensitivity of the measuring element (21). Elements (51) for adjusting the functions with the help of additional connections are also present. The sensitivity and zero point of the pressure sensor in the fully assembled chip (20) can therefore be adjusted from the outside without laser adjustment. The pressure sensor (11) is also relatively small and compact.
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