Straightness measurement using laser beam straight datum

Using the direction stabilized laser beam as a physical straight datum, instead of the tangible reference surface, a method is proposed for the measurement of an error motion of a slide table and/or surface profile of mechanical components. A specially designed 2D position sensor/compensator for laser beam center is developed combining a quadrant photo-diode (QPD) position sensor for beam center and the piezo-compensator which compensates the beam shift from the center of QPD. By the use the sensor/compensator proposed, the positional and angular fluctuations of laser beam path is evaluated with nanometric resolution. Combining the sensor with the piezo-driven mirror compensator, the directional stabilizer for the laser beam is also designed in the same manner as the sensor/compensator. The stabilized He-Ne laser beam can be used as the metrological datum of straightness within the accuracy of 2 X 10 -8 rad. By mounting the position sensor/compensator on a slide table, the carriage with working distance of 1 m is so designed and built as to move straight along the stabilized laser beam. The carriage can be used as a mechanical straight datum with the accuracy equivalent to the laser beam stability.