60 GHz micromachined patch antenna for wireless applications

Micromachined patch antennas at 60 GHz were fabricated on 400 µm silicon wafers. These were fed by a microstrip-to-coplanar transition. Good agreement was found between simulation and fabrication designs' return loss. The attained bandwidth was ∼3 GHz. Surface waves excited in the substrate, diminished radiation. This was observed in the radiation patterns. Even so, a 4.6 dBi gain was achieved. Lastly, different feeding mechanisms are mentioned to avoid poor radiation.