Piezoelectrically pushed rotational micromirrors using detached PZT actuators for wide-angle optical switch applications

This paper presents a torsional micromirror detached from PZT actuators (TMD), whose rotational motion is achieved by push bars in the PZT actuators, detached from the micromirror. The push bar mechanism is intended to reduce the bending, tensile and torsional constraints generated by the conventional bending bar mechanism, where the torsional micromirror is attached to the PZT actuators (TMA). We have designed, fabricated and tested the prototypes of TMDs for single-axis and dual-axis rotations, respectively. The single-axis TMD generates a static rotational angle of 6.1° at 16 Vdc, which is six times larger than that of the single-axis TMA, 0.9°. However, the rotational response curve of TMD shows hysteresis and zero offset due to the static friction from the initial contact force between the cover and the push bar in the PZT actuator. We have shown that 63.2% of the hysteresis is reduced by eliminating the initial contact force of the PZT actuator. The dual-axis TMD generates static rotational angles of 5.5° and 4.7° in the x-axis and y-axis, respectively, at 16 Vdc. The measured resonant frequencies of the dual-axis TMD are 2.1 ± 0.1 kHz in the x-axis and 1.7 ± 0.1 kHz in the y-axis. The dual-axis TMD shows stable operation without severe wear for 21.6 million cycles driven by the 16 Vp-p sinusoidal wave signal at room temperature.