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Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnects
Thickness dependence and annealing behavior of Pt-group metal thin films as alternative metals for advanced interconnects
2016
Shibesh Dutta
Karl Opsomer
Anamul Hoque
Kristof Peeters
Olivier Richard
Christophe Detavernier
Sven Van Elshocht
Juergen Boemmels
Zsolt Tokei
Wilfried Vandervorst
Christoph Adelmann
Keywords:
Thin film
Annealing (metallurgy)
Metallurgy
Materials science
Metal
metal thin film
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