Apparatus for manufacturing a semiconductor device manufacturing method and a recording medium of a semiconductor device
2012
Comprising a treatment liquid supply unit for supplying the processing liquid into the processing chamber for accommodating a substrate, a heating unit for heating the processing liquid in the processing chamber, arranged in the processing chamber, a substrate support for supporting a substrate.
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI