Analysis of the Influence of High-Frequency Excitation Into Quality of the Replicated Microstructure

In the present research, surface relief diffraction gratings were fabricated and investigated. The purpose of this research was to determine the collection of parameters, which influence the diffraction efficiency most positively. For replication process ultrasonic thermal embossing was selected with different manufacturing regimes (time, pressure, and temperature). Diffraction efficiencies of periodical microstructures were measured experimentally. The results have shown increase of periodical microstructure quality with the help of high-frequency oscillations during manufacturing. Combination of pressing time, pressure, temperature, and vibrations improved the efficiency of replication process.