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Obtained by Pulsed Magnetron Sputtering
Obtained by Pulsed Magnetron Sputtering
2014
V. M. Beresnev
I. M. Torianyk
O. V. Sobol
A. D. Pogrebnyak
N.G. Stervoedov
U. S. Nyemchenko
D. A. Kolesnikov
S. A. Klimenko
P. V. Turbin
Keywords:
High-power impulse magnetron sputtering
Sputter deposition
Analytical chemistry
Materials science
Optoelectronics
Correction
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