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Characteristics of all-Nb thin film microbridges fabricated by nanometer process
Characteristics of all-Nb thin film microbridges fabricated by nanometer process
1991
Yoshinori Uzawa
Nobumitsu Hirose
Yuichi Harada
Motoaki Sano
Matsuo Sekine
Kazuo Yamaguchi
Hiroyuki Ozaki
Akira Hirao
Shigeru Yoshimori
Mitsuo Kawamura
Keywords:
Nanometre
Reactive-ion etching
Cathode ray
Radiation effect
Electron-beam lithography
Josephson effect
Thin film
Materials science
Analytical chemistry
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