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The Effect of Doping on the Structure of Zinc Oxide Obtained by Atomic Layer Deposition
The Effect of Doping on the Structure of Zinc Oxide Obtained by Atomic Layer Deposition
2020
Gulnar Sugurbekova
Yerzhigit Sugurbekov
Gulzat Demeuova
Oral Ualibek
Aliya Kurbanova
Olzat Toktarbaiuly
Ozhet Mauit
Keywords:
Materials science
Atomic layer deposition
Metallurgy
Zinc
Doping
aluminum doped zinc oxide
Chemical engineering
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