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Integration of ALD WCN into a dual damascene oxide module
Integration of ALD WCN into a dual damascene oxide module
2003
Jörg Schuhmacher
Gerald Beyer
Ingrid Vos
Victor Sutcliffe
Zsolt Tokei
Wim Besling
Karen Maex
Keywords:
Oxide
Copper interconnect
Electronic engineering
Materials science
Optoelectronics
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