Dielectric Enhancement and Maxwell-Wagner Effect in Polycrystalline BaTiO3/Ba0.2Sr0.8TiO3 Multilayered Thin Films

Polycrystalline BaTiO3/Ba0.2Sr0.8TiO3 multilayer thin films were fabricated by pulsed laser deposition onto Pt/Ti/SiO2/Si substrates with various stacking periodicities. The dielectric constant of the films was obviously enhanced with the decrease of the individual layer thickness, while the dielectric loss was kept at a low level comparable to that of the pure Ba0.6Sr0.4TiO3 thin films. The Maxwell-Wagner model is used to explain the experimental data.