Measurement of thermal transport properties of selected superlattice and thin films using frequency-domain photothermal infrared radiometry

Abstract Thermal transport properties in multi-layered semiconductor samples are reported using modulated photothermal infrared radiometry (PTR). The cross-plane thermal conductivity and diffusivity of thin AlxGa(1-x)As layers and AlAs/GaAs superlattices were determined by fitting solutions of the heat equation for multi-layered systems to PTR data. The thermal conductivity of an AlxGa(1-x)As film with x = 0.5 was found to be lower than an AlxGa(1-x)As film with x = 0.33 which is expected as scattering from alloy disorder is maximized for x = 0.5. In addition, it was found that thermal conductivities of AlAs/GaAs superlattices decrease when the superlattice period is decreased for a constant total thickness which is expected since the number of AlAs/GaAs interfaces (which impede thermal transport) increases as the period decreases. The maximum PTR amplitude signal was found to occur when the diffusion length of the thermal wave is on other order of the thickness of the semiconductor layer. The accuracy and applicability of photothermal infrared radiometry to the study of semiconductor multilayer structures are further discussed in the paper.