Reaction apparatus of chlorosilanes

Raw material gas in the reaction tube chlorosilanes supplied to the interior, to provide a reactor sufficiently suppressed can chlorosilanes from leaking to the outside through the tube wall of the reaction tube. Chlorosilane to react from the lower end portion to a predetermined consists portion up heights reaction portion where the silicon is adhered to the inner surface, chlorosilanes by contacting chlorosilanes to the inner surface thereof under heat and hydrogen in the carbon reactor transmitting the reactor of the kind, on the inner and / or outer surface of the non-reactive portion of the upper side of the reaction portion of the reaction tube, is supplied to the reaction tube was chlorosilanes the pipe wall of the non-reactive portion of the reaction tube It was subjected to gas permeation suppression processing for suppressing the leak to the outside and.