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Photonic integration using shadow masked growth.
Photonic integration using shadow masked growth.
1996
Gerrit Vermeire
G. Coudenys
Ingrid Moerman
Y. Zhu
L. Buydens
C. Eeckhout
Peter Van Daele
Piet Demeester
Keywords:
Photonics
Optoelectronics
Shadow
Materials science
Optics
Physics
Correction
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