CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas

S. Yoshitsune,Shinichiro Nishiyama,Naohisa Iwamoto,Yukinobu Tokunaga,Masanori Shinohara,Hiroshi Fujiyama

CVD・PVD Hybrid DLC Coating to Extra Fine Wire by Quadrupole Magnetron Plasmas

2009

S. Yoshitsune
Shinichiro Nishiyama
Naohisa Iwamoto
Yukinobu Tokunaga
Masanori Shinohara
Hiroshi Fujiyama

It was investigated that characteristics of DLC thin films deposited to extra fine wire by CH4 gas, Ar gas and CH4/Ar gas mixtures. It was found that the characteristics of films are change depending on mixture rate of the gases.

Keywords:

Thin film
Plasma
Coating
Cavity magnetron
Quadrupole
Analytical chemistry
Materials science
Composite material
dlc coating

Correction
Source
Cite
Save
Machine Reading By IdeaReader

References

Citations