X-ray scattering measurement method

X-ray scattering measurement method of a microstructural measurement of a sample surface, said method comprising the steps of: Reflecting a by an X-ray source generated (140) X-ray beam having a first mirror (151) Reflecting by the first mirror (151) reflected X-ray beam with a second mirror (152) Occur to let the by the second mirror (152) reflected X-ray beam on the sample (S) and Detecting the scattered on the sample surface X-ray beam with a two-dimensional detector (170) wherein the first mirror (151) focuses the X-ray beam generated and the second mirror (152) to by the first mirror (151) reflected X-ray beam is focused, the first mirror (151) a Krummungsebene perpendicular to Probenoberflache and having the two-dimensional detector (170) focused and the second mirror (152) a Krummungsebene perpendicular to Krummungsebene the first mirror (151) and the Probenoberflache focused, or wherein the second mirror has a curvature plane perpendicular to the sample surface and focused onto the two-dimensional detector and the first mirror has a curvature plane perpendicular to the plane of curvature of the second mirror and focused on the sample surface, wherein the sample (S) by means of a sample stage (110) is rotated in a plane of the sample surface and thus on the sample surface by a periodic structure of diffracted X-ray beam through the two-dimensional detector (170) is detected.