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Depth Profile of Various Bonding Configration of Nitrogen Atoms in Silicon Oxynitrides formed by Plasma Nitridation
Depth Profile of Various Bonding Configration of Nitrogen Atoms in Silicon Oxynitrides formed by Plasma Nitridation
2005
Hiroshi Nohira
S. Shinagawa
Tetsuya Ikuta
Mitsuaki Hori
M. Kase
H. Okamoto
Takeo Hattori
Keywords:
Nitrogen
Plasma
Atom
Inorganic chemistry
Silicon
Chemistry
plasma nitridation
Materials science
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