Plasma treatment for cleaning of copper or nickel

A method of treating electronic components made of or coated with copper or nickel or their alloys with one another or with other materials such as brass comprises the following steps: DOLLAR A evacuating the treatment chamber; Introducing oxygen into the treatment chamber; Exciting a plasma in the chamber; Action of oxygen radicals on the components; Pumping out the chamber; Introducing hydrogen into the treatment chamber; Exciting a plasma in the chamber; Effect of hydrogen radicals on the components.