Analysis of Oxygen and Nitrogen Redistribution at Interfaces of HfO2 with Laminate TiN/TiAl/TiN Electrodes
2020
The
physicochemical nature of the change in the effective work
function (EWF) of aluminum doped TiN (using TiN/TiAl/TiN laminate
structure) was studied by X-ray photoelectron spectroscopy with high
kinetic energies (HAXPES). Comparative analysis of Si/SiO2/HfO2/TiN-TiAl-TiN and Si/SiO2/HfO2/TiN stacks reveals identical composition of the HfO2/TiN
interfaces in both stacks. It was established that the EWF decrease
for TiN/TiAl/TiN laminate electrode with respect to the “normal”
value for TiN is related to redistribution of light N and O atoms
in the bulk of TiN/TiAl/TiN instead of frequently supposed Al diffusion
and formation of HfAlOx mixed oxide at
the HfO2/TiN interface. Formation of nonstoichiometric
TiNx, metallic Ti and Al, and AlN in the
bulk of TiN/TiAl/TiN was revealed by HAXPES.
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
47
References
3
Citations
NaN
KQI