Method of fabricating micro-lens and method of fabricating optical module using the method
2004
The present invention provides a method of preparing a microlens and a method of preparing an optical module using this method. To prepare the microlenses, forming a thin film material for the micro lenses on the substrate. Film formed on the photoresist pattern to form a thin film structure using the photoresist pattern by etching the thin film, and formed by a thin film structure of the heat-treated at reflux microlens.
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