Ultra-low-power organic resistance changing memory device and manufacturing method thereof
2012
The invention discloses an ultra-low-power organic resistance changing memory device and a manufacturing method of the ultra-low-power organic resistance changing memory device, belonging to the technical field of organic electronics and CMOS-mixed integrated circuit. The device is manufactured on a substrate, a device unit is an MIM capacity structure, a bottom layer of the MIM structure is an inert electrode such as metal or non-metal conductive thin-film, a top layer of the MIM structure is an active electrode such as metal Al, a middle function layer of the MIM sturcture is a poly-p-xylylene polymer film growing after multi-deposition. According to the invention, the device adopts the poly-p-xylylene polymer film growing after multi-deposition as the function layer, programming current of a memory is less than 0.5 muA, and erase current of the memory is reduced to about 10 nA or lower, therefore, the ultra-low-power operations of the organic resistance changing memory are implemented.
Keywords:
- Correction
- Source
- Cite
- Save
- Machine Reading By IdeaReader
0
References
0
Citations
NaN
KQI