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Metal oxide (Ta-TaOx)-coatings obtained by magnetron sputtering and heat treatment with high-frequency currents
Metal oxide (Ta-TaOx)-coatings obtained by magnetron sputtering and heat treatment with high-frequency currents
2018
Marina Fomina
A Voyko
A Shumilin
V Papshev
Andrey M. Zakharevich
A. Skaptsov
Aleksandr A. Fomin
Keywords:
Sputter deposition
Oxide
Inorganic chemistry
Materials science
Metal
Composite material
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