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Nanoscale kinetics and dynamics during Ar+ patterning of SiO2
Nanoscale kinetics and dynamics during Ar+ patterning of SiO2
2019
Mahsa Mokhtarzadeh
Jeffrey G. Ulbrandt
Peco Myint
Suresh Narayanan
Randall L. Headrick
Karl F. Ludwig
Keywords:
Chemical physics
Condensed matter physics
Nanoscopic scale
Physics
Kinetics
Correction
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