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Micro-mechanical characterization of thin organic and silica films
Micro-mechanical characterization of thin organic and silica films
2007
Tom Van der Donck
S Van Gils
G Eneman
Hai Phuc Nguyen
G Van Bael
Ann Witvrouw
Renaud Côte
Christ Glorieux
Jean-Pierre Celis
Keywords:
Carbon film
Materials science
Composite material
Chemical engineering
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