Microscopic Three-Dimensional Inner Stress Measurement on Laser Induced Damage

A three-dimensional (3-D) residual stress detection technique is proposed to detect and evaluate the residual stress occurring in optical components due to repairs carried out at laser induced damage sites. It is possible with a cross-orthogonal reflective photo-elastic setup to obtain complete 3-D information of the residual shearing stress around the damage site. The damaged volume of the optical component is numerically sliced into multilayers for this purpose and reflected light intensity is recorded from each layer. The shearing stress from the reflected light intensity is then calculated based on photo-elasticity theory. The validity of the approach is also verified in experiments where it could measure 3-D residual stress with an axial resolution of 10 µm along the light path.