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1859 Influence of Etching Damage on the Strength of MEMS Micromirror
1859 Influence of Etching Damage on the Strength of MEMS Micromirror
2005
Makoto Yamaguchi
Kunihiko Sasao
Satoshi Izumi
Shinsuke Sakai
Atsushi Suzuki
Yuzuru Ueda
Keywords:
Etching
Microelectromechanical systems
Composite material
Materials science
Optoelectronics
Correction
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