Geometric compensation of (100) single crystal silicon disk resonating gyroscope for mode-matching

In this paper, we show two methods for modifying the design of a Disk Resonating Gyroscope (DRG) to compensate for the mechanical anisotropy in single crystal silicon. This method is validated through experimental characterization of more than 70 different devices. With the proposed methods, the frequency split of the 250kHz DRG “wineglass” modes in single crystal silicon was reduced from >10kHz to as los as 96Hz without any electrostatic tuning. These results allow development of high-performance miniature DRGs tuned for degenerate-mode operation from high-quality crystalline silicon material.