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Building The Design Space Of An Electrostatic Chuck Used In The Plasma-Etching Process
Building The Design Space Of An Electrostatic Chuck Used In The Plasma-Etching Process
2012
jilinhong
Yuemin Hou
Jia Cheng
Yuchun Sun
Keywords:
TRIZ
Manufacturing engineering
Plasma etching
Engineering
design space
Mechanical engineering
Correction
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