Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like structures from plasma state of CO2 gas

Abstract The Plasma Enhanced Chemical Vapor Deposition synthesis of graphene-like vertical structures from the plasma state of CO2 gas on various catalyst-free substrates is experimentally studied. A peculiarity of the synthesis conditions is the ability to control a plasma density in the synthesis region to very low values. The physical processes taking place on substrates, as well as models for the nucleation of primary aromatic rings and further growth of the formed graphene structures are considered.