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The Effect of Rapid Thermal Annealing on the Quality of Thin Thermal Oxides
The Effect of Rapid Thermal Annealing on the Quality of Thin Thermal Oxides
1989
Wendt
Spitzer
Bensch
Sichart
Keywords:
Optoelectronics
rapid thermal annealing
Electric field
Capacitor
Rapid thermal processing
quality
electric breakdown
Thermal
Logic gate
Materials science
Correction
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