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In-situ Determination of the Carrier Concentration of (001) GaAs by Reflectance Anisotropy Spectroscopy
In-situ Determination of the Carrier Concentration of (001) GaAs by Reflectance Anisotropy Spectroscopy
2001
Markus Pristovsek
Shiro Tsukamoto
Nobuyuki Koguchi
B. Han
K. Haberland
J.-T. Zettler
W. Richter
M. Zorn
M. Weyers
Keywords:
Spectroscopy
In situ
Anisotropy
Physics
Reflectivity
Analytical chemistry
Correction
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