Miniature Robots for Ultra Precision Measurement and Machining

In this report, we describe the central concept of precision manufacturing system which is organized by several miniature robots. The miniature robot is incorporated with micro-sensor for monitoring, micro-manipulator for precise operation and actuator for precision moving, and they are organized to work for precision manufacturing in cooperation with each other and conventional machines. We introduce the developed miniature robot which can move on not only horizontal plane but also wall and ceiling surfaces with sub-micron positioning resolution and demonstrate performances of surface measurement. Keyword: mini-robot, precision work, piezo-actuator, electromagnetic-leg.