Uncooled amorphous silicon 16x16 infrared focal plane arrays development

2009

This paper describes the design and fabrication of 1616 microbolometer infrared focal plane arrays based on iMEMS technology. Amorphous silicon was used for infrared-sensitive material, and it showed the resistance of 18 Mohm and the temperature coefficient of resistivity of -2.4 %. The fabricated sensors exhibited responsivity of 78 kV/W and thermal time constant of 8.0 msec at a bias voltage of 0.5 V. The array performances had satisfactory uniformity less than 5 % within one-sigma. Also, 1/f noise of pixel was measured and the noise factor of was extracted. Finally, we obtained detectivity of and noise equivalent temperature difference of 200 mK at a frame rate of 30 Hz.

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