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Acemap > Paper > Ar+CH 4 バリア放電を用いたa-C:H堆積におけるAr(1s 3,5 )およびCHのレーザ分光診断

Ar+CH 4 バリア放電を用いたa-C:H堆積におけるAr(1s 3,5 )およびCHのレーザ分光診断

2003 
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