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Low-Resistance Ohmic Contact Formation by Laser Annealing of N-Implanted 4H-SiC
Low-Resistance Ohmic Contact Formation by Laser Annealing of N-Implanted 4H-SiC
2020
Carsten Hellinger
Oleg Rusch
Mathias Rommel
Anton J. Bauer
Tobias Erlbacher
Keywords:
Metallurgy
Composite material
low resistance
Ohmic contact
laser annealing
Materials science
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