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CVD-ZrO_2薄膜の形成条件と耐食性の関係のエリプソメトリ - による解析
CVD-ZrO_2薄膜の形成条件と耐食性の関係のエリプソメトリ - による解析
1996
sou otoko kubota
noboru akao
nobuyosi hara
katuhisa sugimoto
Keywords:
Chemical vapor deposition
Corrosion
Ellipsometry
Refractive index
Materials science
Inorganic chemistry
Analytical chemistry
in situ analysis
Chemical engineering
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