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Combinatorial plasma CVD of hydrogenated amorphous silicon
Combinatorial plasma CVD of hydrogenated amorphous silicon
1998
Hideomi Koinuma
Norio Matsuki
Reina Maruyama
S. Yasuda
Keywords:
Plasma
Amorphous silicon
Amorphous carbon
Nanocrystalline silicon
Materials science
Inorganic chemistry
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