Analysis of thin and thick Films

Due to its enormous sensitivity and ease of use, mass spectrometry has grown into the analytical tool of choice in most industries and areas of research. This unique reference provides an extensive library of methods used in mass spectrometry, covering applications of mass spectrometry in fields as diverse as drug discovery, environmental science, forensic science, clinical analysis, polymers, oil composition, doping, cellular research, semiconductor, ceramics, metals and alloys, and homeland security. The book provides the reader with a protocol for the technique described (including sampling methods) and explains why to use a particular method and not others. Essential for MS specialists working in industrial, environmental, and clinical fields. This chapter contains sections titled: Introduction Thin and Thick Layers: A Tentative Definition What Specific Information MS Techniques could Bring to thin and thick Films Analysis Compared to other Techniques? Main MS Techniques Applied to Thin/Thick Films Time of Sputtering/Speed of Acquisition Trade‐Off Differences in Sputtering/Ionization Mechanisms between SIMS and GD‐MS Pulse Shapes and how to Best Use Temporal Information for Pulsed Glow Discharge Mass Spectrometry Measurement and Data Interpretation in GD‐TOFMS Practical Examples Conclusions List of Abbreviations References