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PFC Abatement Using Microwave plasma source with annular-shaped slot antenna at sub-torr pressure
PFC Abatement Using Microwave plasma source with annular-shaped slot antenna at sub-torr pressure
2017
Seungil Park
Sung-Young Yoon
Changho Yi
Seong Bong Kim
Seungmin Ryu
Jaesung Oh
Suk-Jae Yoo
Keywords:
Torr
Slot antenna
Electronic engineering
Ion source
Materials science
Optics
Correction
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