Mask plate and manufacturing method thereof

2013 
The invention provides a mask plate manufacturing method and a mask plate manufactured by adopting the method. The mask plate manufacturing method comprises the following steps of providing a substrate; thinning the middle area of the substrate to form a mask area, and enabling an area which is not thinned to form a mask frame; etching an area where a mask pattern block is to be formed in the mask area to form mask through holes and mask lines. As the integral substrate is adopted by the mask plate manufacturing method provided by the invention, the mask frame and a mask are formed simultaneously through multiple thinning and etching. As the mask frame and the mask are of an integral structure, the mask frame and the mask do not need to be fixed through the hauling and welding process, and therefore, the process flow of the mask plate is simplified, so that the mask plate manufacturing process is simpler. Furthermore, as the mask plate provided by the invention is manufactured by adopting the method, damage to the mask through holes during the hauling and welding process is avoided, and therefore, the quality of the mask plate can be improved.
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