Experimental research on micro electrochemical milling of nickel-based superalloy by using high-speed rotary helical electrode with high frequency pulse power supply

With the development of high and new technology, the trend of miniaturization, integration and intellectualization of products is obvious, especially in the field of micro electromechanical system (MEMS). Micro electrochemical machining (ECM) technology is considered to be an extremely promising micro processing method due to many advantages. In this paper, micro helical electrodes with high rotating speed and high frequency pulse power supply were used in the process of micro ECM, and the theoretical analysis and a series of experiments of milling were carried out. Based on the principle of controlling single variable, the influence of main machining parameters such as applied voltage, pulse width, pulse period and feed rate on machining accuracy and stability were explored. Finally, by optimizing the machining parameters, a series of groove microstructures were obtained by electrolytic milling.