Reconfigurable mask for adaptive coded aperture imaging (ACAI) based on an addressable MOEMS microshutter array

Coded aperture imaging has been used for astronomical applications for several years. Typical implementations use a fixed mask pattern and are designed to operate in the X-Ray or gamma ray bands. More recent applications have emerged in the visible and infra red bands for low cost lens-less imaging systems. System studies have shown that considerable advantages in image resolution may accrue from the use of multiple different images of the same scene - requiring a reconfigurable mask. We report on work to develop a novel, reconfigurable mask based on micro-opto-electro-mechanical systems (MOEMS) technology employing interference effects to modulate incident light in the mid-IR band (3-5μm). This is achieved by tuning a large array of asymmetric Fabry-Perot cavities by applying an electrostatic force to adjust the gap between a moveable upper polysilicon mirror plate supported on suspensions and underlying fixed (electrode) layers on a silicon substrate. A key advantage of the modulator technology developed is that it is transmissive and high speed (e.g. 100kHz) - allowing simpler imaging system configurations. It is also realised using a modified standard polysilicon surface micromachining process (i.e. MUMPS-like) that is widely available and hence should have a low production cost in volume. We have developed designs capable of operating across the entire mid-IR band with peak transmissions approaching 100% and high contrast. By using a pixelated array of small mirrors, a large area device comprising individually addressable elements may be realised that allows reconfiguring of the whole mask at speeds in excess of video frame rates.