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Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel
Device architectures and their integration challenges for 1x nm node: FinFETs and high mobility channel
2012
Naoto Horiguchi
Gerd Zschaetzsch
Yuichiro Sasaki
Ajay Kumar Kambham
Mitsuhiro Togo
Moon Ju Cho
Lars-Ake Ragnarsson
Geert Hellings
Jerome Mitard
Jacopo Franco
Geert Eneman
Liesbeth Witters
Niamh Waldron
Dennis Lin
Luigi Pantisano
Nadine Collaert
Wilfried Vandervorst
Aaron Thean
Keywords:
Electronic engineering
Communication channel
Materials science
Computer science
Electrical engineering
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