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Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates
Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates
2001
M. Eickhoff
S. Zappe
A. Nielsen
G. Krötz
E. Obermeier
N. Vouroutzis
J. Stoemenos
Keywords:
Silicon on insulator
Metallurgy
Composite material
Epitaxy
Materials science
selective deposition
Optoelectronics
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