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Interface reactions of B$sub 2$O$sub 3$--Si system and boron diffusion into silicon
Interface reactions of B$sub 2$O$sub 3$--Si system and boron diffusion into silicon
1973
E. Arai
H. Nakamura
Y. Terunuma
Keywords:
Chemical reaction
Oxygen
Boron
Silicon oxide
Chemistry
Silicon
Inorganic chemistry
boron diffusion
Correction
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