Development and psychometric evaluation of the Pleasant Activities List
2008
An anti-reflective coating layer which is used to provide better control over the photolithographic process during the contact masking step is removed using a boiling phosphoric acid bath to reduce the amount of thickness variations that remain after the metal contact is filled in the contact hole and planarized by polishing. As a result, post-polish defect inspections are facilitated.
- Correction
- Cite
- Save
- Machine Reading By IdeaReader
44
References
0
Citations
NaN
KQI