Old Web
English
Sign In
Acemap
>
Paper
>
Specific Features of the Electromechanical Interactions in MEMS with Nonparallel Electrodes
Specific Features of the Electromechanical Interactions in MEMS with Nonparallel Electrodes
2017
Valery Dragunov
D. E. Kiselev
Rodion Sinitskiy
Keywords:
Microelectromechanical systems
Materials science
Electronic engineering
Optoelectronics
Correction
Source
Cite
Save
Machine Reading By IdeaReader
0
References
2
Citations
NaN
KQI
[]