Light-stimulated neural electrode device based on golden wire ball bonding method and manufacturing method thereof

The invention provides a light-simulated neural electrode device based on a golden wire ball bonding method and a manufacturing method thereof. The method comprises steps: 1, a patterned bottom polyimide insulation layer is manufactured, and square holes are opened; 2, a middle circuit layer is manufactured; 3; a patterned top polyimide insulation layer is manufactured, and square holes and round holes are opened at the same positions; 4; a micro LED bare chip is placed in two layers of polyimide square holes, and instantaneous drying glue is applied to the periphery of the micro LED bare chip; 5, by adopting the golden wire ball bonding method, the micro LED bare chip and a golden circuit layer are connected; 6, epoxy resin glue is applied for realizing packaging; and 7, a sacrificial layer is corroded, and electrode release is completed. The electrode device of the invention mainly aims at providing power for the micro LED bare chip, and light emitting by the LED carries out light simulation on an experimental animal with specific gene transfection; and the process is simple, the LED is arranged flexibly, devices of different forms can be manufactured according to different simulation areas, and a new tool is provided for implantable medical device development and neuroscience research.