New models for optical MEMS

Computer Aided Design (CAD) tools for modeling optical MEM systems must not only model three distinct domains (optical, electrical, and mechanical), these tools must also model the interactions between the signals of these domains. We strive to create system-level models that are applicable for an optical MEM CAD tool using techniques that support accurate results and interactive computation times. This paper discusses our modeling efforts for multi-domain optical MEM systems with the implementation of these models into our CAD framework, Chatoyant. As an example of our mixed-modeling research, we present the simulation and analysis of a 2x2 optical cross connect using Chatoyant. The simulations include the dynamic response of a mechanical beam, diffractive optical effects, and the interaction between these domains.